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Description

ParameterGlass Wafer Standard Specification
MaterialGlass, Fused Silica etc.
Diameter4”, 6”, 8”, 12” etc.
Diameter Tolerance+/-0.01mm
Mini. THK.0.2mm(< 6”), 0.3mm(8”), 0.35mm(12”)
TTV<1μm
BOW<20μm
WARP<30μm
Surface Quality20-10
RoughnessRa<0.2nm
Chamfer45°, C0.2+/-0.1mm
CoatingAR film, Reflection film, Splitter film etc.

* Remark:Customized is available

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